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3M Trizact Diamond Pad Conditioner 678XATD2R, 15.84mm x 33m x 75mm core or 0.625in x 110ft x 3in core

Part Number: 00051111904220 View more details
3M Trizact Diamond Pad Conditioner 678XATD2R, 15.84mm x 33m x 75mm core or 0.625in x 110ft x 3in core Image not available

Product Specifications

Size
15.84mm x 33m x 75mm core or 0.625in x 110ft x 3in core
Unit of Measure
EA
Minimum Order Qty
1 EA
Incremental Order Qty
1 EA
Stock Type
Make To Order
Manufacturer ID
7100198867
UPC
00051111904220
ECCN
EAR99
Manufacturer
3M

Details

Highlights

3D microreplicated structures help manufacturers deliver precision and control for unique requirements
Diamond coated ceramic material can be manufactured to key specifications for maximum yield and pad life
Metal-free composition is ideal advanced node processes sensitive to contamination
Outstanding disk-to-disk consistency for predictive performance
3M Trizact Pad Conditioner delivers precision, consistency and reliability to semiconductor chemical mechanical polishing (CMP). The diamond-coated ceramic construction on 3M Trizact Pad Conditioner is ideal for manufacturing to micro-scale specifications, as well as exceptionally smooth pad surface finishes without tiny scratches commonly caused by diamond grit abrasives. It has a metal-free cutting surface for advanced node processes sensitive to metal contamination. It can also be combined with 3M CMP Pad Conditioner Coatings to help reduce metal leaching by up to an additional 99% while maintaining flatness, aggressiveness and polishing performance.